Suppression of Dewetting in Pulsed Laser Melting of Thin Metallic Films on Silica

by Kline, James Eric

Abstract (Summary)
Pulsed excimer laser projection irradiation has been successfully applied to completely melt and resolidify encapsulated elemental metal films of Au, Cu, Cr, and Ni directly on amorphous SiO2 substrates. A combination of narrow irradiated lines and appropriate SiO2 capping layers was used to obtain films that do not dewet when fully melted. Detailed processing maps were generated for Au and Ni, while equivalent trends for Cu and Cr were also noted. These systems were analyzed for common behaviors. These behaviors have been generalized into a basic process map that may apply more generally. Experimental parameters and sample preparation criteria are presented to realize such resolidification studies in other metal systems.
Bibliographical Information:

Advisor:Dr. Kevin Chen; Dr. John Barnard; Dr. Jorg M.K. Wiezorek; Dr. John Leonard

School:University of Pittsburgh

School Location:USA - Pennsylvania

Source Type:Master's Thesis

Keywords:materials science and engineering


Date of Publication:10/13/2005

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