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Performance Evaluation of Treating Chemical Mechanical Polishing Wastewaters by a Simultaneous Electrocoagulation/Electrofiltration Process Using Laboratory-Prepared Tubular Composite Membranes

by Chang, Yuan-hao

Abstract (Summary)
In this study, two types of chemical mechanical polishing wastewaters (designated Cu-CMP wastewater and mixed-CMP wastewater, respectively) from a wafer fabrication plant was treated by a simultaneous electrocoagulation/electrofiltration (EC/EF) process using laboratory-prepared TiO2/Al2O3 composite membranes. First, tubular membrane supports of Al2O3 were prepared by the extrusion method. Then the slip composed of nanoscale TiO2 (prepared by sol-gel process) and 1 wt% of corn starch was applied on the aforementioned tubular membrane supports by the dip-coating method, followed by sintering to obtain tubular TiO2/Al2O3 composite membranes. These tubular inorganic composite membranes then were incorporated into an EC/EF treatment module for the treatment of CMP wastewaters. The permeate qualities were evaluated. In addition, the effects of different operating modes (i.e., the flow-through mode and recirculation mode) on membrane flux and permeate quality were conducted. Finally, the effects of changing the backwash time and backwash cycle on the membrane flux were also investigated. Experimental results have shown that the slip containing 75 v/v% of TiO2 sol and 25 v/v% of corn starch solution would yield a membrane layer with a thickness of 13 £gm and a pore size of 15 nm. On the CMP wastewater treatment, the removal efficiencies of copper ion and total organic carbon (TOC) were found to increase with the increasing electric field strength. This relationship, however, did not apply to other water quality items. Under the optimal operating conditions of using the recirculation mode, the removal efficiencies for turbidity and TOC for Cu-CMP wastewater were determined to be 98% and 90%, respectively. Similarly, a turbidity of < 1 NTU (a removal efficiency of 99%) was obtained for mixed-CMP wastewater. By using the same optimal operating conditions for the recirculation mode to treat Cu-CMP wastewater, initial fluxes of 300 L/h¡Em2 and 280 L/h¡Em2 were obtained for the flow-through mode and recirculation mode, respectively. The corresponding initial fluxes for mixed-CMP wastewater were 370 L/h¡Em2 and 360 L/h¡Em2, respectively. For the case of the recirculation mode, the removal efficiencies of total solids content, silicon, copper ion, TOC, and turbidity for Cu-CMP wastewater were 71%, 85%, 72%, 90% and 99%, respectively. The corresponding removal efficiencies of 68%, 88%, 78%, 90% and 99%, respectively were determined for the case of the flow-through mode. On the other hand, the removal efficiencies of total solids content, silicon, TOC, and turbidity for mixed-CMP wastewater using the recirculation mode were 76%, 84%, 78% and 99%, respectively; whereas 78%, 86%, 72% and 99%, respectively for the flow-through mode. Based on the above findings, the operating mode is not a significant parameter in influencing the membrane flux and quality. Permeate obtained in this work was found to be recyclable for the use in irrigation and make-up water for cooling towers. Backwashing was found to be important to the membrane flux in this study.
Bibliographical Information:

Advisor:Tsung-yin Yang; Ya-wen Ko; Gordon C. C. Yang; Hsuan-hsien Yeh

School:National Sun Yat-Sen University

School Location:China - Taiwan

Source Type:Master's Thesis

Keywords:chemical mechanical polishing wastewater electrofiltration electrocoagulation tubular inorganic composite membrane

ISBN:

Date of Publication:02/14/2008

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