Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators Multi-physics Modeling and Calibration for Self-sensing of Thermomechanical In-plane Microactuators
This thesis develops a multi-physics model of the TIM to realize this sensing approach. This model determines the mechanical state of the TIM using the same electrical signal that actuates the TIM. In this way the TIM is able to operate as a self-sensing actuator. To allow this multi-physics model to be tractable, work was done to simplify the thermal modeling of the TIM. A preliminary calibration approach was developed to adequately compensate for variations between devices. Thermal modeling and calibration were coupled with mechanical modeling and a developed sensing approach to form the full multi-physics model of the TIM. Validation testing of the model was performed with a modified calibration approach which showed good correlation with experimental data.
School:Brigham Young University
School Location:USA - Utah
Source Type:Master's Thesis
Keywords:teichert byu piezoresistance calibration self sensing thermomechanical in plane microactuator mems
Date of Publication:07/02/2008