Modeling and simulation methods for RF MEMS VCOs

by Sankaranarayanan, Janakiram Ganesh

This work focusses on the modeling and the development of efficient coupled simulation techniques for MEMS based RF oscillators. High-level models for MEMS based varactors have been discussed and their accuracy issues are identified, based on comparisons with numerical simulations. A faster simulation approach based on the time-domain shooting method is proposed for computation of the steady state in MEMS based oscillators. Analysis, simulation and modeling techniques to characterize the effect of mechanical noise on the phase noise performance of these VCOs is presented.