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The Design Of A Nanolithographic Process

by Johannes, Matthew Steven

Abstract (Summary)
This research delineates the design of a nanolithographic process

for nanometer scale surface patterning. The process involves the

combination of serial atomic force microscope (AFM) based

nanolithography with the parallel patterning capabilities of soft

lithography. The union of these two techniques provides for a unique

approach to nanoscale patterning that establishes a research

knowledge base and tools for future research and prototyping.To successfully design this process a number of separate research

investigations were undertaken. A custom 3-axis AFM with feedback

control on three positioning axes of nanometer precision was

designed in order to execute nanolithographic research. This AFM

system integrates a computer aided design/computer aided

manufacturing (CAD/CAM) environment to allow for the direct

synthesis of nanostructures and patterns using a virtual design

interface. This AFM instrument was leveraged primarily to study

anodization nanolithography (ANL), a nanoscale patterning technique

used to generate local surface oxide layers on metals and

semiconductors. Defining research focused on the automated

generation of complex oxide nanoscale patterns as directed by

CAD/CAM design as well as the implementation of tip-sample current

feedback control during ANL to increase oxide uniformity.

Concurrently, research was conducted concerning soft lithography,

primarily in microcontact printing (µCP), and pertinent

experimental and analytic techniques and procedures were

investigated.Due to the masking abilities of the resulting oxide patterns from

ANL, the results of AFM based patterning experiments are coupled

with micromachining techniques to create higher aspect ratio

structures at the nanoscale. These relief structures are used as

master pattern molds for polymeric stamp formation to reproduce the

original in a parallel fashion using µCP stamp formation and

patterning. This new method of master fabrication provides for a

useful alternative to conventional techniques for soft lithographic

stamp formation and patterning.

Bibliographical Information:

Advisor:Clark, Robert L

School:Duke University

School Location:USA - North Carolina

Source Type:Master's Thesis

Keywords:engineering mechanical materials science atomic force microscope soft lithography anodization microcontact printing nanolithography nanotechnology

ISBN:

Date of Publication:07/02/2007

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