Critical issues of complex, epitaxial oxide growth and integration with silicon by molecular beam epitaxy [electronic resource] /
Abstract (Summary)
The full text of the dissertation is available as a Adobe Acrobat .pdf file (181 p.) ; Adobe Acrobat Reader required to view the file.
Bibliographical Information:
Advisor:
School:Pennsylvania State University
School Location:USA - Pennsylvania
Source Type:Master's Thesis
Keywords:oxides silicon molecular beam epitaxy
ISBN:
Date of Publication: