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Critical issues of complex, epitaxial oxide growth and integration with silicon by molecular beam epitaxy [electronic resource] /

by Lettieri, James.

Abstract (Summary)
The full text of the dissertation is available as a Adobe Acrobat .pdf file (181 p.) ; Adobe Acrobat Reader required to view the file.
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Advisor:

School:Pennsylvania State University

School Location:USA - Pennsylvania

Source Type:Master's Thesis

Keywords:oxides silicon molecular beam epitaxy

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